Characterization of Argon Plasma Induced by Simple 2.45 GHz Microwave Source


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Abstract


A simple and inexpensive 2.45 GHz microwave plasma source was accomplished and characterized. Characterization was done to the argon plasma expanded outside the microwave interaction zone with the gas load  through information gathered from the double Langmuir probe measurements of electron temperature and electron density, the maximum obtained plasma electron temperature and electron density were around 20 eV and 8×1010 cm-3 respectively.
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Keywords


Microwave Induced Plasma; Double Langmuir Probe

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