Growth and Structure of Silver Oxide Thin Films Using Rapid Thermal Oxidation Method


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Abstract


The thermal evaporation system type (Edwards) has been used to evaporate high purity (99.9 %) silver on glass substrates at room temperature under low pressure (about 10-6  torr) for different thickness (50, 75, 100, 125 and 150) nm. Using a rapid thermal oxidation (RTO) of Ag film at oxidation temperature 350 oC and different oxidation times, Ag2O thin film was prepared. The structural properties of Ag2O film were investigated and compared with other published results. The structural investigation showed that the films formed at thickness 100 nm showed (111) stron reflection along with weak reflections of (101) correspond to the growth of single phase Ag2O with cubic structure.
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Keywords


Ag2O; Rapid Thermal Oxidation; FTIR; Structural Properties

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References


N. Yamamoto, S. Tonomura, T. Matsuoka, H. Tsubomura, Jpn. J. Appl. Phys. 20 (1981) 721.

S. Haratani, J. Tominaga, H. Dohl, S. Takayama, J. Appl. Phys. 76 (1994) 1297.

J. Tominaga, D. Buchel, C. Mihalcea, T. Shima, T. Fukaya, Mater. Res. Soc. Symp. Proc. 728 (2002) 179.

F.H. Wu, H.-P.D. Shieh, Jpn. J. Appl. Phys. Part 1 42 (2003) 820.

L.A.A. Pettersson, P.G. Snyder, Thin Solid Films 270 (1995) 69.

A.A. Schmidt, J. Offermann, R. Anton, Thin Solid Films 281/282 (1996) 105.

S.M. Hou, M. Ouyang, H.F. Chen, W.M. Liu, Z.Q. Xue, Q.D. Wu, H.X. Zhang, H.J. Gao, S.J. Pang, Thin Solid Films 315 (1998) 322.

U.K. Barik, A. Subrahmanyam, in: V. Kumar, P.K. Basu (Eds.), Proceedings of the 11th International Workshop on Physics of Semiconductor Devices, New Dehli, India, Dec. 11 – 15, 2000, SPIE, vol. 4746, 2002, p. 1271.

U.K. Barik, S. Srinivasan, C.L. Nagendra, A. Subrahmanyam, Thin Solid Films 429 (2003) 129.

Y. Chiu, U. Rambabu, M.-H. Hsu, H.-P.D. Shieh, C.-Y. Chen, H.-H. Lin, J. Appl. Phys. 94 (2003) 1996.

T. Shima, J. Tominaga, J. Vac. Sci. Technol., A, Vac. Surf. Films 21 (2003) 634.

C.H. Chou, J. Phillips, J. Vac. Sci. Technol., A, Vac. Surf. Films 9 (1991) 2727.

M.K. Bhan, P.K. Nag, G.P. Miller, J.C. Gregory, J. Vac. Sci. Technol., A, Vac. Surf. Films 12 (1994) 699.

J. Vrijmoeth, H.A. van der Vegt, J.A. Meyer, E. Vlieg, R.J. Behm, Phys. Rev. Lett. 72 (1994) 3843.

H.A. van der Vegt, W.J. Huisman, P.B. Howes, T.S. Turner, E. Vlieg, Surf. Sci. 365 (1996) 205.

R. Moroni, F. Bisio, A. Gussoni, M. Canepa, L. Mattera, Surf. Sci. 482– 485 (2001) 850.

M. Onishi, L. Li, S. Toril, A. Kida, M. Doi, M. Matsui, Mater. Trans. 43 (2002) 2143.

D.J. Larson, A.K. Peford-Long, A. Cerezo, S.P. Bozeman, A. Morrone, Y.Q. Ma, A. Georgalakis, P.H. Clifton, Phys. Rev., B 67 (2003) 144420– 144421.

J. Assal, B. Hallstedt, L.J. Gauckler, J. Am. Ceram. Soc. 80 (1997) 3054.

R.W.G. Wyckoff, 2nd ed., Crystal Structures, vol. 1, Wiley, New York, 1963.

W.A. Parkhurst, S. Dallek, B.F. Larrick, J. Electrochem. Soc. 131 (1984) 1739.

S. Dallek, W.A. West, B.F. Larrick, J. Electrochem. Soc. 133 (1986) 2451.

S. Dallek, W.A. Parkhurst, B.F. Larrick, Thermochim. Acta 78 (1984) 333.

B.V. L’vov, Thermochim. Acta 333 (1999) 13.

G.I.N. Waterhouse, G.A. Bowmaker, J.B. Metson, Phys. Chem. Chem. Phys. 3 (2001) 3838.

G. Scho¨n, Acta Chem. Scand. 27 (1973) 2623.


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