XY-Stage with Bimorph Piezoelectric Actuators

Arkadii B. Smirnov; Mikhail N. Polishchuck; Arkadii N. Popov; Phi Diep Hoang

doi:10.15866/ireme.v12i9.15353

XY-Stage with Bimorph Piezoelectric Actuators

Arkadii B. Smirnov^(1*), Mikhail N. Polishchuck⁽²⁾, Arkadii N. Popov⁽³⁾, Phi Diep Hoang⁽⁴⁾

^(*) Corresponding author

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DOI: https://doi.org/10.15866/ireme.v12i9.15353

Abstract

The paper provides results of development and study of the XY microscope stage with piezoelectric actuators. Analysis of devices of the multi-axis platform for micropositioning objects is presented. A principle operation of XY microscope stage with parallel kinematics with bimorph piezoelectric actuators (BPA) is described. The dependencies of the displacement stage for the X and Y axes of on the voltages, which were applied to the BPA are determined. The results of the experimental research in the XY-stage are given and conclusions about their using are presented. Equations of motion and transfer functions of movement for the module of control actions for the linearized model are obtained. The impact of non-linearity with hysteresis by means of computer simulation in Simulink, resulting into development of block diagrams of the control system with PID controllers on the X and Y axes is investigated. Necessary requirements in terms of accuracy and performance solutions for precise positioning tasks with feedback on moving and optimal tuning PID parameters are suggested.
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Keywords

XY Microscope Operating Stage; Micro Displacement; Bimorph Piezoelectric Actuators; Parallel Kinematic; Exact Positioning; Mathematical Model; Experimental Research; Dynamic Model; Accuracy; PID-Controller; Computer Simulation; Hysteresis

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References

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