Finite Element Analysis and Modeling of Mems Pressure Sensor for Intraocular Pressure


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Abstract


This paper presents the Finite Element Analysis (FEA) of MEMS based capacitive pressure sensor to monitor intraocular pressure. The sensor composed of a square Polysilicon diaphragm that deflects in response to applied pressure. Applied pressure deflects the 2 µm diaphragm, changing the capacitance between the Polysilicon diaphragm and the bottom electrode Si substrate.  The square diaphragm produces highest induced stress resulting in high sensitivity. Intellisuite FEA modeling software was used to predict sensor actuation, capacitance output and the avoidance of material failure. The FEA modeling and simulated data results is generated. The simulation of the MEMS capacitive pressure sensor achieves good linearity in the intraocular pressure range. The geometry and dimensions are selected to produce optimal performance of the sensor.
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Keywords


MEMS; Biosensor; Glaucoma; Square Diaphragm; Finite Element Analysis

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