Modeling and Simulation of the Mechanical and Electrical Response of the Piezoresistive Force Sensor

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Micro-electromechanical systems (MEMS) is a technological process used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimeters. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. In this work, we need to study the mechanical and electrical behavior of the piezoresistive force sensor. This study is divided into two parts:  initially we study the mechanical response. The stress repartition on the surface of the piezoresistive cantilever makes it possible to determine the ideal site of the gauges. In second part, the study of the electric response makes it possible to determine the variation of induced electric resistance within the gauges according to the deformations
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Force Sensor; Microsystem; Piezoresistive Cantilevers; Silicon; Stress

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