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Electrical Characteristics of an Argon Glow Discharge in the Presence of Metastable Atom Density


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DOI: https://doi.org/10.15866/iree.v11i2.8230

Abstract


The paper deals with numerical modelling studies of DC glow discharge in argon with metastable atom density. The values of pressure is between 133.32 Pa and 330 Pa, and voltage ranges from 250 to 400 V in the case of input data taken from the Boltzmann equation in multi term approximation. In the frameworks, an analysis of glow discharge characteristics is carried out in the case of input data obtained from BOLISG+ code. As conclusion of these different input data in the same gas the output results are different and they appear in the cathode region. The spatio-temporal distributions of electron and ion densities, the potential and electric field, the mean electron energy and the metastable atom density are shown. A 1D fluid model is used to solve self-consistently the first three moments of the Boltzmann equation coupled with the Poisson's equation. The results are validated with those obtained by recent papers.
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Keywords


Metastable Atom Density; Glow Discharge; Fluid Model; Input Data

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