Three-Dimensional Simulation of Metal-Semiconductor-Metal Photodetectors Based InAlAs/InGaAs


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Abstract


Interdigitated metal–semiconductor–metal (MSM) photodetectors based on InAlAs/InGaAs materials have received considerable attention for applications in high-speed optical-fiber communication systems which require efficient light detection in the 1.3-1.55 µm range. The performance of thin-film inverted MSM are analyzed and compared to conventional MSM, that was modeled and simulated using Silvaco TCAD (Technology Computer Aided Design) and ATLAS software. We show how the interdigital spacing and thickness of the InGaAs layer influence the impulse response and the associated bandwidth.
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Keywords


InAlAs; InGaAs; Schottky; MSM

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References


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