Open Access Open Access  Restricted Access Subscription or Fee Access

Design of Hybrid Closed Loop Control Systems for a MEMS Accelerometer Using Nonlinear Control Principles

(*) Corresponding author

Authors' affiliations



This paper presents and compares two novel hybrid control algorithms applicable to the conventional capacitive MEMS accelerometer. These schemes are realized by separately adding a sliding-mode and a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value, a criteria which is necessary for a shock resistance system. The analysis of convergence and resolution show that while the proposed control schemes satisfy these criteria they also keep resolution performance better than what is normally obtained in conventional PID controllers. The performance of the two proposed hybrid controllers investigated here is compared and validated by computer simulation.
Copyright © 2014 Praise Worthy Prize - All rights reserved.


Sliding-Mode Controller; Backstepping Controller; Closed Loop Control; MEMS Accelerometer; PID Controller

Full Text:



System Planning Corporation, Micro Electro Mechanical Systems (MEMS) an SPC market study, 1994.

Gang Zhang, Design and Simulation of CMOS-MEMS, accelerometer, M.S. Dissertation, Carnegie Mellon University, May 1998.

N. Yazdi, F. Ayazi, And K. Najafi, Micromachined Inertial Sensors, Proceeding of the IEEE, vol. 86, no. 8, Aug. 1998.

Vishal Gupta, Approaches to Synthesis of a CMOS Accelerometer, M.Sc. Dissertation, Carnegie Mellon University, (2002).

C. Edvards and S. K.Spurgeon, Sliding Mode Control, TAYLOR & FRANCIS, 1998.

M. Krstic, I. Kanelleskapoulas, P. Kokotovic, Nonlinear and Adaptive Control design, John Wiley and Sons. Inc, New York, 1995.

J. Slotine, E. Jacques, Applied Nonlinear Control, Prentice-Hall, 1991.

J. T. Spooner, M. Maggiore, R. Ordonez and K. M. Passino, Stable Adaptive Control and Estimation for Nonlinear Systems, John Wiley and Sons, Inc, New York, 2002.

S.E. Lyshvitz, M.A. Lyshvitz, Analysis, Dynamics, and Control of Micro-Electromechanical Systems, in Proceeding of American Control Conference Chicago, Illinois, pp. 3091-3095, June 2000.

G. Zhu, J. Penet, and L. Saydy, Robust Control of an Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties, in Proceeding of the 2006 American Control Conference Minneapolis, Minnesota, USA, pp. 1233-1238, June (2006).

S. Park and R. Horowitz, Adaptive Control for the Conventional Mode of Operation of MEMS Gyroscopes, pp. 489-494.

ADXL150/ADXL250 data sheet, Analog Devices.

M. Kraft, Closed Loop Digital Accelerometer Employing Oversampling Conversion, Ph.D. Dissertation, Convertry University, U.K., 1997.

K. M. Park, “Methodologies for MEMS Device Performance and Damage Monitoring, Ph.D. Dissertation, Stevens Institute of Technology, Castle Point on Hudson, 2002.


  • There are currently no refbacks.

Please send any question about this web site to
Copyright © 2005-2023 Praise Worthy Prize