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Multiphysics Base of Modelling of the MEMS Micromirror and Simulation by Modal Control

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This paper presents the introduction of a method for optical design, modelling and simulation of a three-dimensional microelectromechanical system (3D MEMS) based on a photonic cross-connect. The 3D MEMS switch fabric architecture based on highly reactive micromirrors is ideal for switches with large and medium ports of counts. Due to this reason, it is necessary to provide responsive closed-loop control to position the mirrors accurately representing optimization of control by an advantage of the 3D optical MEMS. In optimization of control of 3D MEMS technologies, the position control utilizing an optical feedback is not capable of correcting shocks, vibrations and other instabilities. The forwarded 3D MEMS closed-loop control technology employs integrated position-sensing electronics in a closed-loop control system of a position of micromirrors and maintains stability. Simulation results of modal control represent a chosen position of a micromirror depending on capacity changes between the micromirror and the electrodes. The paper presents closed-loop control, as well as multi-physical modelling and simulation of a double-gimbaled MEMS-based cross-connect. Moreover, the case study including simulation and optimization of micromirror tilting is also given. Possibilities of applying the presented optimization of closed-loop control are straightforward, and they are able to improve dynamic behaviour of micromirrors significantly.
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Closed-Loop Control; Double-Gimbaled MEMS-Based Micromirror Cross-Connect; Electrostatic Torsional Micromirror; Multi-Physical Modelling and Simulation; Optical Cross-Connect

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M. A. Bourouha, M. Bataineh, M. Guizani, “Advances in optical switching and networking: past, present, and future,” in Proc. IEEE, Southeast Con, pp. 405-413, 2002.

B. Cagdaser, A. Jog, M. Last et al., “Capacitive sense feedback control for MEMS beam steering mirrors,” Solid-State Sensor, Actuator and Microsystems Workshop, South Carolina, June 6-10, pp. 348-351, 2004.

Ma Xiachua, G. S. Kuo, “Optical switching technology comparison: optical MEMS vs. other technologies,”IEEE Commun. Magaz., 41 (11), 16-23, 2003.

V. Slodičák, “Some useful structures for categorical approach for program behaviour”, Journal of Information and Organizational Sciences, Vol. 35, (Issue 1), 93-103, ISSN 1846-3312, 2011.

M. Napoli, C. Olroyd, B. Bamieh and K. Turner, “A novel sensing scheme for the displacement of electrostatically actuated microcantilevers,” in Proceedings of the American Control Conference, vol. 4, pp. 2475-2480, 2005.

A. K. Pandey, R. Pratap, “A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry,“ Journal of Micromechanics and Microengineering, 18 (2008) 105003, 2-12. IOP Publishing Ltd, 2008.

I. Plander, M. Stepanovsky, “The multiphysics model of the gas-damped micromirror for the MEMS-based optical switch,” in Proc. of the 6th Vienna Conference on Mathematical Modelling. pp. 2700-2703, ARGESIM, 2009.

I. Plander, M. Stepanovsky, “Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation,” Simulation Modelling Practice and Theory, Vol. 20, (Issue 1), 59-69, ISSN 1569-190X, 2012.

A. Neukermans, “MEMS technology for optical interconnect and networking applications,” in Proc. LEOS, vol. 2, pp.732-733, 2001.

Han, Y., Passivity-Based Control Scheme for the Modular Multilevel Cascaded Converter (MMCC) as the HVDC-PLUS for Smart Grid Applications, (2013) International Review of Electrical Engineering (IREE), 8 (2), pp.558-567.

Golshani, A., Bidgoli, M., Bathaee, S., Design of Optimized Sliding Mode Control to Improve the Dynamic Behavior of PMSG Wind Turbine with NPC Back-to-Back Converter, (2013) International Review of Electrical Engineering (IREE), 8 (4), pp. 1170-1180.

Penovi, E., Retegui, R., Maestri, S., Kloster, W., Benedetti, M., Current Estimation for Pulsed Power Applications, (2013) International Review of Electrical Engineering (IREE), 8 (2), pp. 595-602.

P. Kvasnica, I. Kvasnica, Parallel modelling of fault-tolerant software systems, (2012) International Review on Computers and Software (IRECOS), 7 (2), pp. 621-625.

Chikouche, T., Hadjeri, S., Mezouar, A., Terras, T., A New State-Space Nonlinear Control Approach of a Doubly Fed Induction Motor Using Variable Gain PI and Fuzzy Logic Controllers, (2013) International Review on Modelling and Simulations (IREMOS), 6 (1), pp. 59-67.

Payam, A., Hassani, F., Fathipour, M., Design of Hybrid Closed Loop Control Systems for a MEMS Accelerometer Using Nonlinear Control Principles, (2014) International Review of Aerospace Engineering (IREASE), 7 (5), pp. 164-170.

Raman, R., Shanmuganantham, T., Analysis of DC-Metal Contact RF MEMS Switch with Split Beam Structure for Wireless Application, (2015) International Journal on Communications Antenna and Propagation (IRECAP), 5 (6), pp. 379-382.

Houssini, M., El-Khatib, M., Hamié, A., Blondy, P., Abou-Saleh, K., Ghaddar, A., Alaeddine, H., Design of a Flexible Metamaterial RF MEMS Circuit for Multi-Purpose/ a Tunable Bass-Band Filter, (2013) International Journal on Communications Antenna and Propagation (IRECAP), 3 (1), pp. 61-67.

Houssini, M., Blondy, P., El-Khatib, M., Hamié, A., El-Zoghbi, M., Alaeddine, H., Concept and Manufacturing of a 2-Pole Digitally Tunable Filter Based on RF MEMS Varactors, (2013) International Journal on Communications Antenna and Propagation (IRECAP), 3 (2), pp. 103-105.


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